Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670278 | Method of plasma etching of silicon carbide | Si Yi Li, Helen Zhu, S. M. Reza Sadjadi, David R. Pirkle, Michael Goss | 2003-12-30 |
| 6564651 | Modular high-temperature gas flow sensing element for use with a cyclone furnace air flow measuring system | — | 2003-05-20 |