Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6541361 | Plasma enhanced method for increasing silicon-containing photoresist selectivity | Francis Ko, Charlie Lee | 2003-04-01 |
SC
Sandy Chen
Overall (2003): #125,356 of 273,478Top 50%
1
Patents 2003