Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6607425 | Pressurized membrane platen design for improving performance in CMP applications | John M. Boyd, Alek Owczarz | 2003-08-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6607425 | Pressurized membrane platen design for improving performance in CMP applications | John M. Boyd, Alek Owczarz | 2003-08-19 |