Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630407 | Plasma etching of organic antireflective coating | Douglas Keil, Jim Bowers, Eric Wagganer, Tri C. Le | 2003-10-07 |
| 6543459 | Method of determining an end point for a remote microwave plasma cleaning system | — | 2003-04-08 |
| 6518174 | Combined resist strip and barrier etch process for dual damascene structures | Reza Sadjadi | 2003-02-11 |