Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630407 | Plasma etching of organic antireflective coating | Douglas Keil, Jim Bowers, Rao Annapragada, Tri C. Le | 2003-10-07 |
| 6540885 | Profile control of oxide trench features for dual damascene applications | Douglas Keil, Bryan A. Helmer | 2003-04-01 |