Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630201 | Adsorption process for atomic layer deposition | Tony P. Chiang, Jeffrey A. Brown, Jason Babcoke | 2003-10-07 |
| 6569501 | Sequential method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD) | Tony P. Chiang | 2003-05-27 |