Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669811 | Linear drive system for use in a plasma processing system | Keith Dawson, Eric H. Lenz | 2003-12-30 |
| 6536777 | Sealing techniques suitable for different geometries and constrained spaces | Eric H. Lenz, Keith Dawson | 2003-03-25 |
| 6528949 | Apparatus for elimination of plasma lighting inside a gas line in a strong RF field | — | 2003-03-04 |