Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669811 | Linear drive system for use in a plasma processing system | Fangli Hao, Keith Dawson | 2003-12-30 |
| 6602381 | Plasma confinement by use of preferred RF return path | — | 2003-08-05 |
| 6536777 | Sealing techniques suitable for different geometries and constrained spaces | Fangli Hao, Keith Dawson | 2003-03-25 |