Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649996 | In situ and ex situ hardmask process for STI with oxide collar application | Alan J. Miller | 2003-11-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649996 | In situ and ex situ hardmask process for STI with oxide collar application | Alan J. Miller | 2003-11-18 |