AM

Alan J. Miller

Lam Research: 1 patents #78 of 202Top 40%
📍 Moraga, CA: #10 of 28 inventorsTop 40%
🗺 California: #8,996 of 28,521 inventorsTop 35%
Overall (2003): #265,963 of 273,478Top 100%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6649996 In situ and ex situ hardmask process for STI with oxide collar application Fandayani Soesilo 2003-11-18