Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6594002 | Wafer shape accuracy using symmetric and asymmetric instrument error signatures | William Drohan, William Goldfarb, Peter Harvey | 2003-07-15 |
| 6538733 | Ring chuck to hold 200 and 300 mm wafer | Christopher Gaal | 2003-03-25 |