Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6594002 | Wafer shape accuracy using symmetric and asymmetric instrument error signatures | William Goldfarb, Peter Harvey, Jaydeep Sinha | 2003-07-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6594002 | Wafer shape accuracy using symmetric and asymmetric instrument error signatures | William Goldfarb, Peter Harvey, Jaydeep Sinha | 2003-07-15 |