Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630714 | Semiconductor device formed in semiconductor layer arranged on substrate with one of insulating film and cavity interposed between the substrate and the semiconductor layer | Tsutomu Sato, Hajime Nagano, Ichiro Mizushima, Takashi Yamada, Shinichi Nitta | 2003-10-07 |
| 6515733 | Pattern exposure apparatus for transferring circuit pattern on semiconductor wafer and pattern exposure method | — | 2003-02-04 |