Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630714 | Semiconductor device formed in semiconductor layer arranged on substrate with one of insulating film and cavity interposed between the substrate and the semiconductor layer | Tsutomu Sato, Ichiro Mizushima, Takashi Yamada, Yuso Udo, Shinichi Nitta | 2003-10-07 |
| 6531754 | Manufacturing method of partial SOI wafer, semiconductor device using the partial SOI wafer and manufacturing method thereof | Takashi Yamada, Tsutomu Sato, Ichiro Mizushima, Osamu Fujii | 2003-03-11 |