Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6622296 | Exposure mask pattern correction method, pattern formation method, and a program product for operating a computer | Koji Hashimoto, Satoshi Tanaka, Satoshi Usui | 2003-09-16 |
| 6610448 | Alignment method, overlay deviation inspection method and photomask | Takashi Sato | 2003-08-26 |
| 6567972 | Method and apparatus for correcting mask pattern, mask having corrected mask pattern, and storage medium storing program for executing the method for correcting mask pattern | Satoshi Tanaka | 2003-05-20 |
| 6542237 | Exposure method for making precision patterns on a substrate | Suigen Kyoh, Iwao Higashikawa | 2003-04-01 |
| 6536032 | Method of processing exposure mask-pattern data, simulation using this method, and recording medium | Satoshi Tanaka | 2003-03-18 |
| 6507931 | Semiconductor integrated circuit designing method and system | Toshiya Kotani, Satoshi Tanaka | 2003-01-14 |