Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635549 | Method of producing exposure mask | Suigen Kyoh | 2003-10-21 |
| 6542237 | Exposure method for making precision patterns on a substrate | Suigen Kyoh, Soichi Inoue | 2003-04-01 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635549 | Method of producing exposure mask | Suigen Kyoh | 2003-10-21 |
| 6542237 | Exposure method for making precision patterns on a substrate | Suigen Kyoh, Soichi Inoue | 2003-04-01 |