Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617592 | Charged particle beam system and chamber of charged particle beam system | Jun Takamatsu, Kiyoshi Hattori, Hitoshi Sunaoshi, Kiminobu Akeno, Munehiro Ogasawara | 2003-09-09 |