Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617592 | Charged particle beam system and chamber of charged particle beam system | Kiyoshi Hattori, Hitoshi Sunaoshi, Naoharu Shimomura, Kiminobu Akeno, Munehiro Ogasawara | 2003-09-09 |
| 6606149 | Optical system adjusting method for energy beam apparatus | Munehiro Ogasawara, Hitoshi Sunaoshi, Naoharu Shimomaura | 2003-08-12 |