Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642352 | Method of manufacturing material for forming insulating film | Hidenori Suzuki, Katsuyuki Kakinoki, Yoshihisa Nakase, Takashi Okada, Kinji Yamada | 2003-11-04 |
| 6576393 | Composition for resist underlayer film and method for producing the same | Hikaru Sugita, Akio Saito, Kinji Yamada, Yoshihisa Ohta, Yoshiji Yuumoto | 2003-06-10 |
| 6528605 | Diyne-containing (co)polymer, processes for producing the same, and cured film | Toshiyuki Akiike, Matthias Patz, Masayuki Takahashi, Kohei Goto, Takashi Okada +1 more | 2003-03-04 |
| 6503633 | Composition for film formation, process for producing composition for film formation, method of film formation, and silica-based film | Kouichi Hasegawa, Eiji Hayashi, Kinji Yamada | 2003-01-07 |