Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642352 | Method of manufacturing material for forming insulating film | Hidenori Suzuki, Katsuyuki Kakinoki, Yoshihisa Nakase, Michinori Nishikawa, Takashi Okada | 2003-11-04 |
| 6576393 | Composition for resist underlayer film and method for producing the same | Hikaru Sugita, Akio Saito, Michinori Nishikawa, Yoshihisa Ohta, Yoshiji Yuumoto | 2003-06-10 |
| 6558747 | Method of forming insulating film and process for producing semiconductor device | Rempei Nakata, Nobuhide Yamada, Hideshi Miyajima, Akihiro Kojima, Takahiko Kurosawa +3 more | 2003-05-06 |
| 6528605 | Diyne-containing (co)polymer, processes for producing the same, and cured film | Toshiyuki Akiike, Matthias Patz, Masayuki Takahashi, Kohei Goto, Michinori Nishikawa +1 more | 2003-03-04 |
| 6503633 | Composition for film formation, process for producing composition for film formation, method of film formation, and silica-based film | Michinori Nishikawa, Kouichi Hasegawa, Eiji Hayashi | 2003-01-07 |