Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666921 | Chemical vapor deposition apparatus and chemical vapor deposition method | Shiro Sakai, Yuji Mori, Hong-Xing Wang, Yoshiyasu Ishihama, Yutaka Amijima | 2003-12-23 |
| 6638489 | Cleaning process and cleaning agent for harmful gas | Kenji Otsuka, Youji Nawa, Kazuaki Tonari | 2003-10-28 |
| 6592674 | Chemical vapor deposition apparatus and chemical vapor deposition method | Shiro Sakai, Yuji Mori, Hiroyuki Naoi, Hong-Xing Wang, Yoshiyasu Ishihama +1 more | 2003-07-15 |