Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666921 | Chemical vapor deposition apparatus and chemical vapor deposition method | Shiro Sakai, Yukichi Takamatsu, Yuji Mori, Hong-Xing Wang, Yutaka Amijima | 2003-12-23 |
| 6592674 | Chemical vapor deposition apparatus and chemical vapor deposition method | Shiro Sakai, Yukichi Takamatsu, Yuji Mori, Hiroyuki Naoi, Hong-Xing Wang +1 more | 2003-07-15 |