Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624127 | Highly polar cleans for removal of residues from semiconductor structures | Justin K. Brask, Robert Turkot | 2003-09-23 |
| 6620741 | Method for controlling etch bias of carbon doped oxide films | David H. Gracias, Hyun-Mog Park | 2003-09-16 |