Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620741 | Method for controlling etch bias of carbon doped oxide films | Hyun-Mog Park, Vijayakumar Ramachandrarao | 2003-09-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620741 | Method for controlling etch bias of carbon doped oxide films | Hyun-Mog Park, Vijayakumar Ramachandrarao | 2003-09-16 |