Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660649 | In-situ balancing for phase-shifting mask | Giang T. Dao | 2003-12-09 |
| 6625800 | Method and apparatus for physical image based inspection system | Edita Tejnil, Giang T. Dao | 2003-09-23 |
| 6548417 | In-situ balancing for phase-shifting mask | Giang T. Dao | 2003-04-15 |