Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660649 | In-situ balancing for phase-shifting mask | Qi-De Qian | 2003-12-09 |
| 6625800 | Method and apparatus for physical image based inspection system | Qi-De Qian, Edita Tejnil | 2003-09-23 |
| 6610123 | Filtered mask enclosure | Han-Ming Wu | 2003-08-26 |
| 6611327 | Detection of contaminants on low wavelength masks | Arun Ramamoorthy, Christopher Gerth | 2003-08-26 |
| 6569582 | Hinged pellicles and methods of use | Jerry Cullins | 2003-05-27 |
| 6548417 | In-situ balancing for phase-shifting mask | Qi-De Qian | 2003-04-15 |
| 6537706 | Method for making a photolithographic mask | Qing Ma, Jin Lee, Jun Zheng | 2003-03-25 |