Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641959 | Absorberless phase-shifting mask for EUV | — | 2003-11-04 |
| 6630273 | Method to fabricate extreme ultraviolet lithography masks | Mark Thiec-Hien Tran | 2003-10-07 |
| 6610447 | Extreme ultraviolet mask with improved absorber | Guojing Zhang | 2003-08-26 |
| 6607862 | Damascene extreme ultraviolet lithography alternative phase shift photomask and method of making | Fu-Chang Lo | 2003-08-19 |
| 6593041 | Damascene extreme ultraviolet lithography (EUVL) photomask and method of making | — | 2003-07-15 |
| 6583068 | Enhanced inspection of extreme ultraviolet mask | Ted Liang, Guojing Zhang | 2003-06-24 |
| 6562522 | Photomasking | — | 2003-05-13 |