Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6610447 | Extreme ultraviolet mask with improved absorber | Pei-Yang Yan | 2003-08-26 |
| 6583068 | Enhanced inspection of extreme ultraviolet mask | Pei-Yang Yan, Ted Liang | 2003-06-24 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6610447 | Extreme ultraviolet mask with improved absorber | Pei-Yang Yan | 2003-08-26 |
| 6583068 | Enhanced inspection of extreme ultraviolet mask | Pei-Yang Yan, Ted Liang | 2003-06-24 |