Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630074 | Etching composition and use thereof | David L. Rath | 2003-10-07 |
| 6579766 | Dual gate oxide process without critical resist and without N2 implant | Helmut Tews, Kilho Lee | 2003-06-17 |
| 6569769 | Slurry-less chemical-mechanical polishing | Laertis Economikos, Alexander William Simpson | 2003-05-27 |