Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635401 | Resist compositions with polymers having 2-cyano acrylic monomer | Wenjie Li | 2003-10-21 |
| 6627391 | Resist compositions containing lactone additives | Hiroshi Ito | 2003-09-30 |
| 6562554 | Photoresist compositions with cyclic olefin polymers and hydrophobic non-steroidal multi-alicyclic additives | Joseph F. Maniscalco | 2003-05-13 |
| 6534239 | Resist compositions with polymers having pendant groups containing plural acid labile moieties | Margaret C. Lawson, Wenjie Li | 2003-03-18 |