Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6534239 | Resist compositions with polymers having pendant groups containing plural acid labile moieties | Pushkara R. Varanasi, Wenjie Li | 2003-03-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6534239 | Resist compositions with polymers having pendant groups containing plural acid labile moieties | Pushkara R. Varanasi, Wenjie Li | 2003-03-18 |