Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6665109 | Compliant mechanism and method of forming same | Thomas S. Tyrie, William P. Eaton, John J. Lyon | 2003-12-16 |
| 6630367 | Single crystal dual wafer, tunneling sensor and a method of making same | Randall L. Kubena, LeRoy H. Hackett | 2003-10-07 |
| 6597461 | Tunable fabry-perot interferometer using entropic materials | Ravi Verma, Thomas S. Tyrie, John J. Lyon, Ron Pollock | 2003-07-22 |
| 6531332 | Surface micromachining using a thick release process | Andrei M. Shkel | 2003-03-11 |
| 6529659 | Waveguide tunable Bragg grating using compliant microelectromechanical system (MEMS) technology | John Bailey | 2003-03-04 |
| 6519074 | Electrostatically-actuated tunable optical components using entropic materials | Ravi Verma | 2003-02-11 |