Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630367 | Single crystal dual wafer, tunneling sensor and a method of making same | Michael J. Little, LeRoy H. Hackett | 2003-10-07 |
| 6580138 | Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same | David T. Chang | 2003-06-17 |
| 6563184 | Single crystal tunneling sensor or switch with silicon beam structure and a method of making same | David T. Chang | 2003-05-13 |
| 6555404 | Method of manufacturing a dual wafer tunneling gyroscope | David T. Chang | 2003-04-29 |