Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646364 | MEMS actuator with lower power consumption and lower cost simplified fabrication | Burgess R. Johnson | 2003-11-11 |
| 6544655 | Methods for reducing the curvature in boron-doped silicon micromachined structures | Cleopatra Cabuz, Max C. Glenn, Francis M. Erdmann | 2003-04-08 |