Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6544655 | Methods for reducing the curvature in boron-doped silicon micromachined structures | Cleopatra Cabuz, Francis M. Erdmann, Robert D. Horning | 2003-04-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6544655 | Methods for reducing the curvature in boron-doped silicon micromachined structures | Cleopatra Cabuz, Francis M. Erdmann, Robert D. Horning | 2003-04-08 |