Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630433 | Composition for chemical mechanical planarization of copper, tantalum and tantalum nitride | Fan Zhang, Daniel Towery, Shyama Mukherjee | 2003-10-07 |
| 6600229 | Planarizers for spin etch planarization of electronic components | Shyama Mukherjee, Donald Debear | 2003-07-29 |