Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630433 | Composition for chemical mechanical planarization of copper, tantalum and tantalum nitride | Fan Zhang, Joseph Levert, Shyama Mukherjee | 2003-10-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630433 | Composition for chemical mechanical planarization of copper, tantalum and tantalum nitride | Fan Zhang, Joseph Levert, Shyama Mukherjee | 2003-10-07 |