Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627996 | Semiconductor device having fluorine containing silicon oxide layer as dielectric for wiring pattern having anti-reflective layer and insulating layer thereon | Yoshiaki Yamada, Koji Kishimoto | 2003-09-30 |
| 6593231 | Process of manufacturing electron microscopic sample and process of analyzing semiconductor device | Tetsuo Endoh, Fujio Masuoka, Takuji Tanigami, Noboru Takeuchi | 2003-07-15 |
| 6593659 | Dual damascene structure with carbon containing SiO2 dielectric layers | — | 2003-07-15 |
| 6531760 | Semiconductor device | Gen Murakami, Kunihiro Tsubosaki, Masahiro Ichitani, Kunihiko Nishi, Ichiro Anjo +19 more | 2003-03-11 |
| 6523521 | Hot water type first idle control device | Hideaki Andou | 2003-02-25 |