Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617863 | Probing device and manufacturing method thereof, as well as testing apparatus and manufacturing method of semiconductor with use thereof | Akio Hasebe | 2003-09-09 |
| 6566150 | Semiconductor device and manufacturing method thereof including a probe test step and a burn-in test step | Ryuji Kohno, Tetsuo Kumazawa, Makoto Kitano, Akihiko Ariga, Yuji Wada +7 more | 2003-05-20 |