Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6555295 | Resist pattern forming method using anti-reflective layer, resist pattern formed, and method of etching using resist pattern and product formed | Toshihiko Tanaka, Shoichi Uchino | 2003-04-29 |
| 6548312 | Manufacturing method of semiconductor integrated circuit devices and mask manufacturing methods | Katsuya Hayano, Norio Hasegawa, Akira Imai, Eiji Tsujimoto, Takahiro Watanabe | 2003-04-15 |