Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6625004 | Electrostatic actuators with intrinsic stress gradient | Jurgen Musolf | 2003-09-23 |
| 6610593 | Fabrication of semiconductor device with air gaps for ultra low capacitance interconnections and methods of making same | Sue Ann Bidstrup Allen, Clifford Henderson, Hollie Reed, Dhananjay M. Bhusari | 2003-08-26 |
| 6509386 | Porous insulating compounds and method for making same | — | 2003-01-21 |