Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6610593 | Fabrication of semiconductor device with air gaps for ultra low capacitance interconnections and methods of making same | Paul A. Kohl, Sue Ann Bidstrup Allen, Clifford Henderson, Dhananjay M. Bhusari | 2003-08-26 |