Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6668099 | Method of measuring an angle of inclination of trapezoidal micro object side faces | — | 2003-12-23 |
| 6664532 | Method of precision calibration of magnification of scanning microscopes with the use of test diffraction grating | Dmitriy Yeremin | 2003-12-16 |
| 6608294 | Simple method of precision calibration of magnification of a scanning microscopes with the use of test diffraction grating | Dmitriy Yeremin | 2003-08-19 |
| 6573500 | Method of precision calibration of magnification of a scanning microscope with the use of test diffraction grating | Dmitriy Yeremin | 2003-06-03 |
| 6563116 | Method of measuring sizes of trapezoidal structure | — | 2003-05-13 |