Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660089 | Substrate support mechanism and substrate rotation device | Naoyuki Nozawa, Terushige Takeyama | 2003-12-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660089 | Substrate support mechanism and substrate rotation device | Naoyuki Nozawa, Terushige Takeyama | 2003-12-09 |