Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660089 | Substrate support mechanism and substrate rotation device | Naoyuki Nozawa, Miho Sakai | 2003-12-09 |
| 6561343 | Magnetic carrying device | Nobuhito Miyauchi, Takashi Shiba | 2003-05-13 |