Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605312 | Method of producing a thin-film system | Ralf Blüthner, Klaus Goedicke, Michael Junghähnel, Hans Buchberger, Manfred Muller +2 more | 2003-08-12 |
| 6522076 | Process and switching arrangement for pulsing energy introduction into magnetron discharges | Klaus Goedicke, Michael Jungh{overscore (a)}hnel, Karsten Handt, Henry Güldner, Henrik Wolf +1 more | 2003-02-18 |