Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6522076 | Process and switching arrangement for pulsing energy introduction into magnetron discharges | Klaus Goedicke, Torsten Winkler, Michael Jungh{overscore (a)}hnel, Karsten Handt, Henrik Wolf +1 more | 2003-02-18 |