Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617587 | Electron optics for multi-beam electron beam lithography tool | Alan D. Brodie, George Xinsheng Guo, Edward Yin, Michael C. Matter | 2003-09-09 |
NP
N. William Parker
Multibeam Systems: 1 patents #1 of 5Top 20%
Overall (2003): #151,889 of 273,478Top 60%
1
Patents 2003