Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617587 | Electron optics for multi-beam electron beam lithography tool | N. William Parker, Alan D. Brodie, George Xinsheng Guo, Edward Yin | 2003-09-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617587 | Electron optics for multi-beam electron beam lithography tool | N. William Parker, Alan D. Brodie, George Xinsheng Guo, Edward Yin | 2003-09-09 |