Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617722 | Magnetic levitation rotating machine | Atsushi Ooyama, Toshiharu Nakazawa | 2003-09-09 |
| 6589009 | Turbo-molecular pump | Atsushi Shiokawa, Hiroyuki Kawasaki, Hiroshi Sobukawa, Hiroaki Ogamino | 2003-07-08 |
| 6514348 | Substrate processing apparatus | — | 2003-02-04 |